The noncontact and nondestructive measurement method for microstructure dynamic properties
which combines micro scan ning laser Doppler vibrometer (SLDV) with the base excitation
the working principle of SLDV
the base exciter and its drive signal are introduced. The testing results of the typical microstructure — micro cantilever beam are given. It consists with the results of the theoretical calculation and FEM which verifies the effectiveness of this method.