Influence of CrNx/TiyCr1-yN Multilayer Thickness on Hardness and Binding Force

ZHANG Xin; WEN Peigang

doi:10.16080/j.issn1671-833x.2017.14.054

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Influence of CrNx/TiyCr1-yN Multilayer Thickness on Hardness and Binding Force

更新时间：2026-04-17

- Influence of CrNx/TiyCr1-yN Multilayer Thickness on Hardness and Binding Force
- Aeronautical Manufacturing Technology Vol. 60, Issue 14, Pages: 54-56(2017)
- 作者机构：
  
  1. 北京机械工业自动化研究所,北京,100120
  2. 中国航发北京航空材料研究院,北京,100095
- 作者简介：
- 基金信息：
- DOI：10.16080/j.issn1671-833x.2017.14.054
  CLC：
- Published：2017
- 稿件说明：
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张　昕1，温培刚2. 膜层厚比对CrNx /Tiy Cr1-y N 多层膜硬度与结合力影响研究[J]. 航空制造技术, 2017, 60(14): 54-56.

ZHANG Xin1, WEN Peigang2. Influence of CrNx/TiyCr1-yN Multilayer Thickness on Hardness and Binding Force. Aeronautical Manufacturing Technology, 2017, 60(14): 54-56.
张　昕1，温培刚2. 膜层厚比对CrNx /Tiy Cr1-y N 多层膜硬度与结合力影响研究[J]. 航空制造技术, 2017, 60(14): 54-56. DOI： 10.16080/j.issn1671-833x.2017.14.054.

ZHANG Xin1, WEN Peigang2. Influence of CrNx/TiyCr1-yN Multilayer Thickness on Hardness and Binding Force. Aeronautical Manufacturing Technology, 2017, 60(14): 54-56. DOI： 10.16080/j.issn1671-833x.2017.14.054.

摘要

为研究膜层交替周期对多层膜表面硬度与耐磨性能的影响，利用金属蒸发真空弧离子源（MEVVA）和磁过滤阴极真空弧复合离子束沉积技术在AM355 钢材表面制备膜层交替周期分别为5、13 和26 的3 组CrNx/TiyCr1-yN 膜层，利用场发射扫描电子显微镜（FESEM）和X 射线衍射仪（XRD）对膜层形貌和相结构进行了分析，利用划痕仪、显微硬度计等对膜层硬度与结合力进行了测试。结果表明：采用该技术制备的CrNx/TiyCr1-yN 多层膜结构致密，与基体结合良好；随着多层膜交替周期的增加，膜层硬度有所降低，膜层结合力则呈现先升高后缓慢降低的趋势。

Abstract

In order to investigate the influence of laminate periodicity on hardness and wearability

CrNx/TiyCr1-yN coatings with 5

13 and 26 periodic multilayer are prepared on AM355 steel substrate by metal evaporation vacuum arc ion source (MEVVA) and filter cathodic vacuum arc deposition technology. The morphology and phase structure of coatings are observed and analyzed by field emission scanning electron microscope (FESEM) and X-ray diffraction (XRD) respectively. The hardness of coating is tested by microhardness tester and the bond strength is measured by scratch tester. The results show that CrNx/TiyCr1-y coatings with multilayer have dense structure and good bond strength. With the increase of laminate periodicity

the hardness of multilayer decreases while the bond strength shows a trend of increasing at first and slowly lower later.

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