Femtosecond Laser Near-Field Process by Nanospheres Beyond Diffraction Limit：Theoretical and Experimental Development

LOU Qianfeng; LIU Ziyuan; XUE Lei; TAO Haiyan; LIN Jingquan

doi:10.16080/j.issn1671-833x.2018.06.057

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Femtosecond Laser Near-Field Process by Nanospheres Beyond Diffraction Limit：Theoretical and Experimental Development

更新时间：2025-10-30

- Femtosecond Laser Near-Field Process by Nanospheres Beyond Diffraction Limit：Theoretical and Experimental Development
- Aeronautical Manufacturing Technology Vol. 61, Issue 6, Pages: 57-63(2018)
- 作者机构：
  
  1. 长春理工大学理学院,长春,130000
  2. 航空工业成都凯天电子股份有限公司,成都,610000
- 作者简介：
- 基金信息：
- DOI：10.16080/j.issn1671-833x.2018.06.057
  CLC：
- Published：2018
- 稿件说明：
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娄前峰，刘子源，薛磊，陶海岩，林景全. 纳米小球辅助飞秒激光近场超衍射加工的研究进展[J]. 航空制造技术, 2018, 61(6): 57-63.

LOU Qianfeng, LIU Ziyuan, XUE Lei, TAO Haiyan, LIN Jingquan. Femtosecond Laser Near-Field Process by Nanospheres Beyond Diffraction Limit：Theoretical and Experimental Development[J]. Aeronautical Manufacturing Technology, 2018, 61(6): 57-63.
娄前峰，刘子源，薛磊，陶海岩，林景全. 纳米小球辅助飞秒激光近场超衍射加工的研究进展[J]. 航空制造技术, 2018, 61(6): 57-63. DOI： 10.16080/j.issn1671-833x.2018.06.057.

LOU Qianfeng, LIU Ziyuan, XUE Lei, TAO Haiyan, LIN Jingquan. Femtosecond Laser Near-Field Process by Nanospheres Beyond Diffraction Limit：Theoretical and Experimental Development[J]. Aeronautical Manufacturing Technology, 2018, 61(6): 57-63. DOI： 10.16080/j.issn1671-833x.2018.06.057.

摘要

在飞秒激光加工过程中，如何突破衍射极限一直都是一个重要问题。近年来，纳米小球辅助飞秒激光近场超衍射加工逐渐被认识并发展起来，这一加工方法可以在基底表面产生小于入射激光衍射极限尺度的纳米孔洞，并可以实现大面积加工。从金属纳米小球和介电纳米小球这两个方面入手，分别对它们辅助飞秒激光近场加工的研究进行介绍。

Abstract

During the femtosecond laser processing

how to break through the diffraction limit has always been an important problem. In recent years

nanospheres auxiliary femtosecond laser near field processing with characteristic size beyond the diffraction limit is recognized and developed gradually. It can fabricate nanoholes on the substrate surface of which scale is smaller than the incident laser diffraction limit

and can realize large area processing. In this paper

we will focus on the metal nanospheres and dielectric nanospheres

and introduce the study of nanospheres assisted femtosecond laser near field processing.

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