Thin film high temperature sensors have been successfully fabricated on the surface of aero-engine turbine blade by the aid of MEMS micro manufacturing technology. A series of key challenges such as high temperature insulation

lithography on the curved surface

high temperature interconnection have been overcome during the endeavor of the sensor development. The thin film sensor together with the connecting wires can stand for the tough vibration and shocking test (10–2000 Hz/40g vibration intensity and 8g semi-sinusoidal impulse shocking test). The embedded thin film MEMS thermocouple sensor is also capable to detect the high temperature up to 1200℃ in the burning air flow inside aeroengine combustion chamber. The advantage of these thin film sensors is small in size and easy to install

therefore avoiding the disturbance to the environment and less destruction to the blade as possible. They can also be made in batch to form a sensor array for high temperature distribution studies.