Review on High Temperature Thin Film Thermocouple for Aero-Engine

ZHOU Yingfeng; CUI Zaifu; LI Xin; ZHOU Paidi; LI Yali; CHEN Qinnan; SUN Daoheng

doi:10.16080/j.issn1671-833x.2020.06.082

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Review on High Temperature Thin Film Thermocouple for Aero-Engine

更新时间：2025-10-30

- Review on High Temperature Thin Film Thermocouple for Aero-Engine
- Aeronautical Manufacturing Technology Vol. 63, Issue 6, Pages: 82-89(2020)
- 作者机构：
  
  厦门大学航空航天学院,厦门,361102
- 作者简介：
- 基金信息：
- DOI：10.16080/j.issn1671-833x.2020.06.082
  CLC：
- Published：2020
- 稿件说明：
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周颖锋，崔在甫，李鑫，周排弟，李雅莉，陈沁楠，孙道恒. 航空发动机高温薄膜热电偶研究概况[J]. 航空制造技术, 2020, 63(6): 82-89.

ZHOU Yingfeng, CUI Zaifu, LI Xin, ZHOU Paidi, LI Yali, CHEN Qinnan, SUN Daoheng. Review on High Temperature Thin Film Thermocouple for Aero-Engine. Aeronautical Manufacturing Technology, 2020, 63(6): 82-89.
周颖锋，崔在甫，李鑫，周排弟，李雅莉，陈沁楠，孙道恒. 航空发动机高温薄膜热电偶研究概况[J]. 航空制造技术, 2020, 63(6): 82-89. DOI： 10.16080/j.issn1671-833x.2020.06.082.

ZHOU Yingfeng, CUI Zaifu, LI Xin, ZHOU Paidi, LI Yali, CHEN Qinnan, SUN Daoheng. Review on High Temperature Thin Film Thermocouple for Aero-Engine. Aeronautical Manufacturing Technology, 2020, 63(6): 82-89. DOI： 10.16080/j.issn1671-833x.2020.06.082.

摘要

高温薄膜热电偶被认为是解决航空发动机涡轮叶片、燃烧室内壁、高温燃气进出口等极端环境下测温的有效方法。介绍了航空发动机高温薄膜热电偶的研究历史与现状，从薄膜材料、器件性能及其应用等方面总结薄膜热电偶的研究发展趋势；分析了当前薄膜热电偶在敏感材料的高温稳定性、导电基底上多层薄膜材料体系的构建和曲面上传感薄膜制备工艺等面临的挑战；并指出薄膜热电偶未来在使用材料和薄膜制备工艺上可能的发展方向。

Abstract

High temperature film thermocouple is considered as an effective method to measure temperature in extreme environment such as turbine blade

combustion chamber wall and inlet and outlet gas temperature of aero-engine. This paper introduces the research history and current situation of high temperature thin film thermocouple for aero-engine

and summarizes the trends of thin film thermocouple from the thin film material

device performance and applications. The challenges of the current thin film thermocouple in the high temperature stability of sensitive materials

the process of multilayer thin film material system on conductive substrate and the fabrication of sensing thin film on curved surface are analyzed. It also points out the development direction of thin film thermocouple in the future

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