Ultra-Precision Grinding Equipment and Technology for Large-Size Optical Aspheric Surface Components

CHEN Dengling; PENG Yunfeng; WANG Zhenzhong; BI Guo; YANG Ping; YANG Wei; SHI Chenchun; GUO Zhiguang

doi:10.16080/j.issn1671-833x.2020.08.046

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Ultra-Precision Grinding Equipment and Technology for Large-Size Optical Aspheric Surface Components

更新时间：2025-10-30

- Ultra-Precision Grinding Equipment and Technology for Large-Size Optical Aspheric Surface Components
- Aeronautical Manufacturing Technology Vol. 63, Issue 8, Pages: 46-53(2020)
- 作者机构：
  
  厦门大学航空航天学院,厦门,361102
- 作者简介：
- 基金信息：
- DOI：10.16080/j.issn1671-833x.2020.08.046
  CLC：
- Published：2020
- 稿件说明：
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陈登铃，彭云峰，王振忠，毕果，杨平，杨炜，施晨淳，郭志光. 大口径光学非球面超精密磨削装备与技术[J]. 航空制造技术, 2020, 63(8): 46-53.

CHEN Dengling, PENG Yunfeng, WANG Zhenzhong, BI Guo, YANG Ping, YANG Wei, SHI Chenchun, GUO Zhiguang. Ultra-Precision Grinding Equipment and Technology for Large-Size Optical Aspheric Surface Components. Aeronautical Manufacturing Technology, 2020, 63(8): 46-53.
陈登铃，彭云峰，王振忠，毕果，杨平，杨炜，施晨淳，郭志光. 大口径光学非球面超精密磨削装备与技术[J]. 航空制造技术, 2020, 63(8): 46-53. DOI： 10.16080/j.issn1671-833x.2020.08.046.

CHEN Dengling, PENG Yunfeng, WANG Zhenzhong, BI Guo, YANG Ping, YANG Wei, SHI Chenchun, GUO Zhiguang. Ultra-Precision Grinding Equipment and Technology for Large-Size Optical Aspheric Surface Components. Aeronautical Manufacturing Technology, 2020, 63(8): 46-53. DOI： 10.16080/j.issn1671-833x.2020.08.046.

摘要

针对大口径光学元件的超精密加工需求，在自主开发的MK7160和2MK1760两台平面磨床的研制基础上，进一步研发了高精度平面磨床 UPG80。与现有大多数大口径平面磨床及 MK7160、2MK1760 磨床相比，UPG80 应用了更先进的关键配套工艺技术，包含液体静压支承技术、砂轮修整技术及智能监测系统等。同时，对磨床 UPG80 的静态精度进行了检测，建立了三坐标轴误差模型对磨床进行误差补偿。在此基础上，采用金刚石圆弧砂轮对 530mm×530mm 口径的光学非球面元件进行加工，获得了良好的加工效果，验证了磨床的可靠性。

Abstract

To meet the demand of ultra-precision machining for large-size optical components

the research group further developed high-precision surface grinder UPG80 on the basis of the two self-developed grinders

MK7160 and 2MK1760. Compared with most existing large-caliber surface grinders and MK7160

2MK1760 grinders

UPG80 used more advanced key supporting technology

including hydrostatic support technology

grinding wheel dressing technology and intelligent monitoring system. In this paper

the static accuracy of UPG80 grinder was tested

and a three-axis error model was established to compensate the error of the grinder. On this basis

the optical components with 530mm×530mm diameter were machined by diamond circular arc grinding wheel

and good processing effect was obtained

which verifies the reliability of the grinder

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