Development of Online View System Based on Backscattered Electrons for Electron Beam Processing

ZHANG Hongyu; XU Haiying; LU Kaitong; ZUO Congjin

doi:10.16080/j.issn1671-833x.2021.03.070

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Development of Online View System Based on Backscattered Electrons for Electron Beam Processing

更新时间：2025-10-30

- Development of Online View System Based on Backscattered Electrons for Electron Beam Processing
- Aeronautical Manufacturing Technology Vol. 64, Issue 3, Pages: 70-75(2021)
- 作者机构：
  
  1. 中国航空制造技术研究院高能束流发生器实验室,北京,100024
  2. 南京理工大学材料科学与工程学院,南京,210094
- 作者简介：
- 基金信息：
- DOI：10.16080/j.issn1671-833x.2021.03.070
  CLC：
- Published：2021
- 稿件说明：
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张红玉，许海鹰，路开通，左从进. 基于背散射电子的电子束加工过程在线观测系统研制[J]. 航空制造技术, 2021, 64(3): 70-75.

ZHANG Hongyu,XU Haiying, LU Kaitong, ZUO Congjin. Development of Online View System Based on Backscattered Electrons for Electron Beam Processing. 航空制造技术, 2021, 64(3): 70-75.
张红玉，许海鹰，路开通，左从进. 基于背散射电子的电子束加工过程在线观测系统研制[J]. 航空制造技术, 2021, 64(3): 70-75. DOI： 10.16080/j.issn1671-833x.2021.03.070.

ZHANG Hongyu,XU Haiying, LU Kaitong, ZUO Congjin. Development of Online View System Based on Backscattered Electrons for Electron Beam Processing. 航空制造技术, 2021, 64(3): 70-75. DOI： 10.16080/j.issn1671-833x.2021.03.070.

摘要

为了在高真空、高温、高金属蒸气的电子束加工过程中获得清晰的观测效果，采用四极板背散射电子接收传感器、高频信号放大电路、高频数据采集卡、高频偏转扫描系统等，研制了一套基于背散射电子的在线观测系统。通过试验验证，所研制系统可以有效观测 100mm×100mm 范围内的工件，图像分辨率为 512 像素×512 像素，图像处理帧数可以达到 6 帧 /s。

Abstract

In order to obtain a clear view of electron beam processing

an online view system was developed based on backscattered electrons with four-plate backscattered electron sensor

high-frequency signal amplification circuit

highfrequency data acquisition card

and high-frequency deflection and scanning system. The experiments indicate that the system can effectively observe the workpiece in the area of 100mm×100mm

the resolution is 512 pixels×512 pixels

and the frames of image processing can reach 6 frames/second.

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Related Institution

State Key Laboratory of Featured Metal Materials and Life-Cycle Safety for Composite Structures

Guangxi University

Shanghai Aerospace Equipment Manufacturer Co., Ltd.

CASC 802 Research Institute of Shanghai Academy of Spaceflight Technology

Nanjing University of Aeronautics and Astronautics

The platform construction and operation are provided by Beijing Founder electronics co., LTD 京ICP备09064830号-19 京公网安备11010802024621
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