Micron-scale surface accuracy and nano-scale surface roughness

as well as the processing interference

path limitation

tool wear

and inefficiency caused by their surface structure

restrict the application of complex surface optical components seriously. In order to solve it

the ultra-precision grinding of the typical complex surface optical components was investigated systematically. A variety of on-machine precision truing for diamond grinding wheels was proposed

and the corresponding ultra-precision grinding technologies were presented. As the results

the single crystal silicon aspheric surface with the roughness R

a

of less than 5nm

the form accuracy PV of less than 527nm/140mm; the sapphire conformal window with the form accuracy PV of less than 2.5μm/50mm; the binderless

tungsten carbide micro-structured surface with the roughness R

a

of less than 70nm was obtained by ultra-precision grinding.