Diamond-like carbon (DLC) films have attracted more and more attention due to their promising mechanical and tribological properties. However

there are some problems in DLC films such as high internal stress

low thermal stability

which restrict the further application and development of DLC films. Moderate metal doped in the DLC films can form nanocrystallines or MeC nanoparticles in the matrix

which depend on the bonding mode between metal and carbon. Those particles with high activity increase the grain boundary slip and change the structure of films

which in turn improve the mechanical and tribological performance of DLC films

and thus provide a new idea for the application and development of the film. Current research progress of the metal doped DLC films is summarized and the development trend of those films in the future is put forward.