In order to enhance the performance and flexibility of EB-PVD machine

the topology circuit of three parts of AC-DC circuits

the technology of several circuits in series and parallel connection

and double closed loop control have been adopted to design high voltage power supply and filament heating power supply. The inverter power supply

filament heating power supply

EB-PVD gun

vacuum system and others control system were assembled to establish a set of EB-PVD test equipment. Besides the high voltage and the maximal EB current output have been detected

the current of filament heating power supply and the input waves of power transformers also have been measured. Through the series of tests

the results show that not only the maximum high voltage output is up to -30kV

but also the inverter power supply has a good constant voltage character during electron beam output. The maximum electron beam current is up to 2000mA at 150A filament heating current. These test results show that the inverter power supply has fine applicability for EB-PVD machine.