Megasonic has obvious advantages in overcoming the limitations of micro-electroforming process because of its low cavitation effect

high sound intensity and acoustic streaming. In this work

a bidirectional surface mount device (SMD) megasonic electrolytic bath was designed. And an integrated megasonic electroforming equipment was designed and made considering of other components of an electroforming reactor. Single directional megasonic assisted electrodeposition and bidirectional megasonic assisted electrodeposition was investigated

respectively. Besides

a traditional deposition of nickel was conducted as the control group. The results show that the planeness value (PV) of electrodeposited layer is 15.03μm without megasonic wave

and the PV of nickel electrodeposited layer is 15.36μm with single directional megasonic assisted. The bidirectional megasonic wave assisted electrodeposition has a planeness value 10.91μm

which obtained the most uniform electrodeposited layer among these three different electrodeposition conditions. Besides

bidirectional megasonic wave assisted electrodeposition can achieve better surface morphology than other conditions.