大径厚比深拱形光学元件高抛变形抑制方法

张昊; 沈羿; 王朋

doi:10.16080/j.issn1671-833x.2020.23/24.087

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大径厚比深拱形光学元件高抛变形抑制方法

研究论文 | 更新时间：2025-10-30

- 大径厚比深拱形光学元件高抛变形抑制方法
- 航空制造技术 2020年63卷第23/24期
- 作者机构：
  
  天津津航技术物理研究所,天津,300308
- 作者简介：
- 基金信息：
- DOI：10.16080/j.issn1671-833x.2020.23/24.087
  中图分类号：
- 纸质出版：2020
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张昊，沈羿，王朋. 大径厚比深拱形光学元件高抛变形抑制方法[J]. 航空制造技术, 2020, 63(23/24): 87-93. ZHANG Hao, SHEN Yi, WANG Peng. Deformation Suppression Method for High-Speed Polishing of Optical Dome With High Ratio of Diameter to Thickness. Aeronautical Manufacturing Technology, 2020, 63(23/24): 87-93.

ZHANG Hao, SHEN Yi, WANG Peng. Deformation Suppression Method for High-Speed Polishing of Optical Dome With High Ratio of Diameter to Thickness[J]. Aeronautical Manufacturing Technology, 2020, 63(23/24).
张昊，沈羿，王朋. 大径厚比深拱形光学元件高抛变形抑制方法[J]. 航空制造技术, 2020, 63(23/24): 87-93. ZHANG Hao, SHEN Yi, WANG Peng. Deformation Suppression Method for High-Speed Polishing of Optical Dome With High Ratio of Diameter to Thickness. Aeronautical Manufacturing Technology, 2020, 63(23/24): 87-93. DOI： 10.16080/j.issn1671-833x.2020.23/24.087.

ZHANG Hao, SHEN Yi, WANG Peng. Deformation Suppression Method for High-Speed Polishing of Optical Dome With High Ratio of Diameter to Thickness[J]. Aeronautical Manufacturing Technology, 2020, 63(23/24). DOI： 10.16080/j.issn1671-833x.2020.23/24.087.

摘要

球面光学零件高速抛光工艺具有生产效率高、面形精度稳定等优势，已经成为光学零件规模化生产必不可少的手段，但部分光学元件具有径厚比大、矢高深等特点，极易发生弯曲或扭转变形，在高转速、高压力条件下进行抛光，受到夹具作用和抛光盘运动等影响，面形精度难以稳定控制，严重制约了抛光效率的提升。针对上述问题，建立大径厚比深拱形光学元件高速抛光动力学模型，进行模态分析，提取影响面形精度的模态特征。在此基础上，采用拓扑优化算法，优化夹具设计，使得加工变形对面形精度的影响大幅度降低。

Abstract

The high-speed polishing has become an indispensable means of spherical optical manufacture because of its process consistency and short production time. However

it is difficult to suppress deformation for optical domes with high ratio of diameter to thickness under high-speed rotation and high pressure. This limits application of high-speed polishing technology in manufacture of optical domes. In this paper

a modal analysis of high-speed polishing process for the optical dome with high ratio of diameter to thickness is demonstrated. Furthermore

a topological optimization of structure of the receipt is proposed and a series of experiments shows that the deformation cause by polishing process can be suppressed effectively.

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