This paper presents a frictional contact MEMS inertial switch to solve the problem of short contact duration and bounce effect of inertial switch. The closing principle of the switch was theoretically analyzed and modeled. A method of enhancing the contact effect by frictional contact was proposed and the switch was designed based on that method. In order to compare the contact performance between frictional contact MEMS inertial switch and other switches

three kinds of inertia switches were fabricated by using UV-LIGA multilayer photolithography and precision micro electroforming. Finally

switches were tested by a standard dropping hammer system and the contact duration of the three switches were obtained. The tested results show that the contact duration of rigid

flexible and frictional contact MEMS inertial switches is 10μs

80μs and 620μs respectively when applied 400g external acceleration. Both rigid and flexible contact MEMS switches have contact bounce

while frictional contact switches close stably without bounce. The frictional contact MEMS inertial switch has great advantages in enhancing the contact effect.