1. 中国航空制造技术研究院高能束流发生器实验室,北京,100024
2. 南京理工大学材料科学与工程学院,南京,210094
纸质出版:2022
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许海鹰,桑兴华,杨波,彭勇. 冷阴极气体放电电子束源系统研制[J]. 航空制造技术, 2022, 65(1/2): 98-105. XU Haiying,SANG Xinghua,YANG Bo,PENG Yong. Development of Gas Discharger Electron Beam Source[J]. Aeronautical Manufacturing Technology, 2022, 65(1/2): 98-105.
Development of Gas Discharger Electron Beam Source[J]. Aeronautical Manufacturing Technology, 2022, 65(1/2).
许海鹰,桑兴华,杨波,彭勇. 冷阴极气体放电电子束源系统研制[J]. 航空制造技术, 2022, 65(1/2): 98-105. XU Haiying,SANG Xinghua,YANG Bo,PENG Yong. Development of Gas Discharger Electron Beam Source[J]. Aeronautical Manufacturing Technology, 2022, 65(1/2): 98-105. DOI: 10.16080/j.issn1671-833x.2022.01/02.098.
Development of Gas Discharger Electron Beam Source[J]. Aeronautical Manufacturing Technology, 2022, 65(1/2). DOI: 10.16080/j.issn1671-833x.2022.01/02.098.
基于冷阴极电子发射机理,设计制造了冷阴极气体放电电子枪及其电子光学系统;为了使其能够长期稳定工作,采用三级AC–DC拓扑电路、功率变压器原边并联与输出端整流电路串联获取高压的电路、双闭环控制及放电保护技术等,设计制造了冷阴极气体放电电子枪逆变电源;基于上述技术研制的冷阴极气体放电电子束源实现了–20kV/1500mA束流输出。试验结果表明,惰性气体作为放电气体,长时间工作易出现束流减小现象;以空气作为放电气体,输出表现为低压大电流特性;给定的He、Ar、空气的气流量小于0.03L/min,输出束流随着加速电压增大而增大;给定加速电压不变,He气流量逐渐增大,输出束流随着气流量增大而增大;第3级AC–DC电路中的IGBT全桥逆变电路的输出电压、电流波形一致较好,可以保障冷阴极气体放电电子束源长期稳定工作、大功率输出的需求。
Based on cold cathode electron emission mechanism
a gas discharge electron beam (EB) gun and its electron optics system had been designed. In order to meet long time work requirement
three-stage AC–DC topology circuit
the circuit of transformer primary side parallel connection and output rectifier circuit series connection to obtain high voltage
double closed-loop control and discharge protection had been adopted to manufacture a inverter power supply. The output beam current of gas discharge electron beam source
which adopted mentioned above technology
is up to –20kV/1500mA. The experimental results show that
when the inert gas is used as the discharge gas
the electron beam current of the gas discharge EB gun will decrease for a long time. When the air is used as the discharge gas
the output characteristic of low voltage and high current is shown. When airflow rate of He
Ar or air is less than 0.03L/min
the output electron beam current increases with acceleration voltage increased. When the constant acceleration voltage is given
the output beam current increases gradually with the He airflow rate increased. The voltage and current waveforms of IGBT bridges in the third stage AC–DC circuit are well accordance
which will meet the need of long time stable operation and high power output.
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