In order to be applicable to high-efficiency coating of large-format materials

a cold cathode electron gun with wide-rectangle beam spot was designed

the key parameters were simulated

effect of the cathode and anode key parameters on electron beam quality were analyzed

and the optimal dimensions of key components of the electron gun were obtained. Key parameters of the developed electron gun were verified on a morphology testing platform of widerectangle beam spot

the actual test results show that focal length of the electron gun is 200 mm

current density reaches 10.3 A/m

2

beam spot length is 650 mm

width is 15 mm

and the designed structure meets the requirements of the widerectangle beam spot emission.