北京航空航天大学机械工程及自动化学院,北京,100191
纸质出版:2018
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杨震,刘方军,张伟. 电子枪静电透镜部件仿真与优化[J]. 航空制造技术, 2018, 61(17): 42-46.
YANG Zhen, LIU Fangjun, ZHANG Wei. Simulation and Optimization of Electrostatic Lens Components of Electron Gun. Aeronautical Manufacturing Technology, 2018, 61(17): 42-46.
杨震,刘方军,张伟. 电子枪静电透镜部件仿真与优化[J]. 航空制造技术, 2018, 61(17): 42-46. DOI: 10.16080/j.issn1671–833x.2018.17.042.
YANG Zhen, LIU Fangjun, ZHANG Wei. Simulation and Optimization of Electrostatic Lens Components of Electron Gun. Aeronautical Manufacturing Technology, 2018, 61(17): 42-46. DOI: 10.16080/j.issn1671–833x.2018.17.042.
根据电磁透镜的原理可知,作用于工件上的工作束斑尺寸与电子束注腰的位置和尺寸相关。电子枪栅极出束孔直径与阳极位置的改变将会引起电场分布的变化,从而改变电子束注腰的位置与尺寸,最终影响工作束斑的大小。运用电磁场仿真软件CST仿真得到了电子枪静电透镜电场分布与束流轨迹。采用单一变量法,模拟得到100mA束流强度下栅极出束孔直径和阳极位置对电子束注腰位置与尺寸的影响规律。仿真结果表明,其他参数相同时,栅极出束孔直径D为2mm、阳极上端面到栅极下端面距离H为15mm时,电子束注腰位置最高,半径最小。选取优化参数D=2mm、H=15mm进行焊接试验,获得了深宽比更大的焊缝,证明达到了减小工作束斑尺寸和优化束流品质的目的。
According to the principle of electromagnetic lens
the size of the beam spot on the workpiece is related to the position and size of the electron beam waist. The change of the diameter of the grid hole and the position of the anode will cause the change of the electric field distribution
which will change the position and size of the electron beam waist
and eventually influence the size of the working beam spot. The electric field distribution and beam trajectory of the electron gun electrostatic lens are obtained by using the EMF simulation software CST. A single variable method was used to simulate the influence of the diameter of the grid hole and the position of anode on the position and size of the electron beam waist
while the intensity of beam was set to 100mA. The simulation results show that when the diameter of the grid hole is 2mm and the distance between the upper surface of anode and the lower end face is 15mm
the position of electron beam waist is highest and the radius is the smallest in the situation of that other parameters are the same. The welding test was carried out by the optimization parameter D=2mm and H=15mm. The welding seam with greater depth to width ratio was obtained. It is proved that the purpose of reducing the size of the working beam spot and optimizing the beam quality is reached.
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