This paper presents a 3–DOF precision positioning system in order to meet the demands of precision positioning for parts in aviation field. The system is driven by three packing piezoelectric actuators and guided by flexure hinges. Strain sensors are adapted to realize close loop control for the piezoelectric actuators. Three laser displacement sensors are employed to measure the position and orientation of the target. Moreover

a kinematics calibration method based on laser displacement sensors is proposed. At last

the precision positioning system is verified by the experiment that the max errors along X and Y are 5.4% and 8.18%

respectively.