It is a big challenge for the traditional calibration to make friction and backlash

so a wide scale and high accuracy calibration technology of linear displacement sensor is proposed. Taking laser interferometer as the reference

linear motor and bearing sliders are the driving unit

the grating achieves closed-loop control

and the positioning accuracy is on the micron level. Meanwhile

by a six-degree-of-freedom adjustable fixture in the calibration process

the reference direction is aligned with the measurement direction to eliminate the Abbe error. Meanwhile

aiming at the special float type sensor

a special fixture is designed to eliminate the deformation with support points

which solves the deformation problem of the measuring rod in the calibration process. The evaluation and verification of the uncertainty show that the calibration method is feasible and effective.