The uniformity of material removal of aspheric polishing process using bonnet is studied in this paper. The influence of rotational velocity of bonnet and workpiece on distribution of material removal is analyzed according to Preston Law and a series of fix polishing experiments are conducted. Accordingly

a uniform material removal method is proposed by modifying contact time and optimizing feed rate of polishing bonnet. The quartz aspheric polishing experiment shows that form error keeps stable and the high-frequency of PSD decreases dramatically. It means that the method proposed in this paper leads to material removal in a uniform way.